›› 2017, Vol. 37 ›› Issue (2): 48-53.doi: 10.16708/j.cnki.1000-758X.2017.0032

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Secondaryelectronemissionpropertiesfromborondopeddiamondfilms

 LI  Li-Li*, DING  Ming-Qing, GAO  Yu-Juan, SHAO  Wen-Sheng, FENG  Jin-Jun   

  1. NationalKeyLaboratoryofScienceandTechnologyonVacuumElectronics,Beijing VacuumElectronicsResearchInstitute,Beijing100015,China
  • Received:2016-11-24 Revised:2017-03-03 Online:2017-04-25 Published:2017-03-17

Abstract: Thecathodematerialsusedinelectronmultiplier,fieldemission cathodeandparticle/photondetectorhavetheproblemoflowsecondaryelectronemissionyieldand unstableemission.Tosolvethisproblem, differentboronconcentrationdiamondfilmsbymicrowaveplasmachemicalvapordepositionwereprepared .ThesurfaceofB-dopeddiamondfilmwastreatedbyHydrogenplasma.Thesecondaryelectronemissi on(SEE)fromB-dopeddiamondfilmswasinvestigated. Thescanningelectronmicroscopy(SEM)andtheRamanspectrumanalysiswereusedtoexaminethepropertiesoftheB-dopeddiamondfilm. ThemaximumSEEyieldupto18.3at1keVprimarybeamenergywasfoundundertheconditionthatthesampleswereleftinairforweeksandsubjecttonotreatmentpriortothemeasurement.Oxidationtreatmentdestroysnegativeelectronaffinity(NEA)whereasheatingupinvacuumsubstantiallybringsbackNEA.B-dopeddiamondfilmisexpectedtobeusedinelectronmultiplier,fieldemissioncathodeandparticle/photondetector.

Key words: B-dopeddiamondfilms, microwaveplasmachemicalvapordeposition, secondaryelectronemission(SEE)yield, negativeelectronaffinity(NEA), electronmultiplier