›› 2017, Vol. 37 ›› Issue (2): 24-31.doi: 10.16708/j.cnki.1000-758X.2017.0030

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Transientcharacteristicsofsecondaryelectronyieldbasedonchargingbalancemode

 FENG  Guo-Bao1,2, LI  Jun1, CUI  Wan-Zhao1,*, LIU  Chun-Liang2, CAO  Meng2   

  1. 1   NationalKeyLaboratoryofScienceandTechnologyonSpaceMicrowave, ChinaAcademyofSpaceTechnology(Xi′an),Xi′an710000,China
    2   KeyLaboratoryforPhysicalElectronicsandDevicesoftheMinistryofEducation,Xi′an JiaotongUniversity,Xi′an710049,China
  • Received:2016-08-31 Revised:2017-02-04 Online:2017-04-25 Published:2017-03-17

Abstract: Theessentialrelationshipbetweensecondaryelectronsemissionand chargingstatesofdielectricwasinvestigatedbasedonchargingbalancemodewithnumericalsimulat ion.BothMonteCarloandfinitedifferencetimedomainalgorithmswereadoptedfornumericalsimulat ion, consideringelasticandinelasticessentialbetweenincidentelectronsandmaterialatomsduringscatte ringprocessandcalculatingdiffusion, driftandtrapeffectsofinternalcharges.Underdifferentchargingbalancemodes, thesecondaryelectronemissionandchargingstatesofdielectricontransientchange, internaldistributionsandsaturationvalueswereanalyzedandsimulated.Theresultsshowthatchargi ngbalancemodescanbedividedintothesecondaryelectron(SE)mode,theleakageelectron(LE) modeandthecombined(CO)mode.TheSEmodecorrespondstothesurfacechargingstate,whiletheLE modecorrespondstothedeepchargingstate.WhenthechargingbalancemodechangestowardsSEmod efromLEmode,boththesecondaryelectronyieldandthenegativesurfacepotentialincreases,while variationtrendsofthetotalchargingquantityandchargingtimeconstantpresenttobeopposite asaresultofbalancemodechange.

Key words: secondaryelectronemission, balancemode, chargingeffect, electronirradiation, numericalsimulation electronirradiation, numericalsimulation