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恒压式气体微流量计的测量误差分析

孟扬   

  1. 兰州物理研究所
  • 发布日期:1999-02-25

Error Analysis of Measurement of Constant Pressure Flowmeter

Meng Yang (Lanzhou Institute of Physics,Lanzhou 730000)   

  • Published:1999-02-25

摘要: 恒压式气体微流量计(CPFM)被多个国家级实验室选作为计量学设备,用来校准真空规和真空漏孔。该文从理论上对CPFM和带参考室的CPFM的流量测量误差进行了分析。测量过程中温度波动和压力波动对CPFM的流量测量误差作用较大。为CPFM增加一个适当的参考室,可以减小测量过程中变容室温度变化对CPFM的流量测量误差的贡献。

关键词: 流量计, 测量误差, 分析

Abstract: The constant pressure flowmeters (CPFMs) were used to calibrate vacuum leaks and vacuum gauges in some national laboratories.The errors of measurement of CPFM and CPFM with a reference chamber were theoretically analyzed in the paper.The variation of temperature and pressure in the measurement process is one of the main parts of measurement errors.With the aid of a reference chamber,the error of measurement contributed by the variation of temperature in the variable chamber can be reduced.